Methane 200 SCCM Smart Mass Flow Controller Digital Gas Mass Flow Meter

Flow range:（0~5，10,20,30,50,100,200,300,500... ）SCCM （0~1,2,3,5,10,50,100,200,500...）   SLM
Accuracy: ±1%F.S     ±0.5%F.S
Linearity: ±0.5~1.5%F.S
Repeatability: ±0.2%F.S
Responding time Electrical  characteristics:10sec  gas  characteristics   ：（1~4）sec
Differential pressure range	0.1~0.5MPa
Max pressure ： 3MPa
Working temperature: 0~70℃
Digital value： RS485    MODBUS
Analog value：DC 0~5V ，4~20mA
Power supply	：DC +15V/24V，flow meter＜400mA，flow controller< 600mA
Electrical connection：D

INQUIRY down load to pdf

Product Details

Product Tags

1.1 Uses and features

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated circuit industries, special materials disciplines, chemical industry, and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments

1.2 Main Specifications

1	Flow range:	（0~5，10,20,30,50,100,200,300,500... ）SCCM （0~1,2,3,5,10,50,100,200,500...）SLM
2	Accuracy	±1%F.S ±0.5%F.S
3	Linearity	±0.5~1.5%F.S
4	Repeatability	±0.2%F.S
5	Responding time	Electrical characteristics:10sec gas characteristics ：（1~4）sec
6	Differential pressure range	0.1~0.5MPa
7	Max pressure	3MPa
8	Working temperature	0~70℃
9	Digital value	RS485 MODBUS
10	Analog value	DC 0~5V ，4~20mA
11	Power supply	DC +15V/24V，flow meter＜400mA，flow controller< 600mA
12	Electrical connection	DB15
13	Leakage rate	1×10-8SCCSHe
14	Material of base	316L Stainless steel
15	Seal material	FKM ，nitrile butadiene rubber ，chloroprene rubber
16	Glad hand	Φ3，Φ6，Φ10，1/8〞,1/4〞， 3/8〞

note:

The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2). The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min)

Standard state stipulates: temperature -----273.15K (0℃);

Pressure ----- 101325 Pa(760mm Hg）

F.S (Full Scale); Full-scale value