UP92 series from LITEN is a single stage low pressure reducing regulator for high purity applications. It features a tied-diaphragm design as well as being springless in design and offering VCR connections.
TECHNICAL DATA
Product
VCR PRESSURE REGULATOR
Inlet Pressure:
3500 psig
Outlet Pressure:
0~25,0~50,0~100 or 0~250 psig
Valve Materials
SS 316L/SS 316L VIM-VAR/SEMI F20 UHP
Valve seat
PCTFE:-10~80℃/14~176°F Pl:-10~150℃/14~302F
Diaphragm
316L SS、Elgiloy®Hastelloy®
Operating Temperature:
PCTFE Seat:-40°F to 140°F/-40°C to 60°C
Leak rates(helium)
<1x10-9 mbar.L/s
Flow coefficient (Cv):
0.5
APPLICATION:
Vespel®Seat:-40°Fto 350°F/-40°C to 177°C
◎ 1/2" point-of-use
◎ Gas cabinets
◎ Semiconductor manufacturing
◎ High flow purging systems