Pressure Regulator 1/2" VCR Female Stainless 0-100 PSIG 316L SS for High-purity and Ultra-high-purity Gases EP Grade

TECHNICAL DATA
Product: VCR PRESSURE REGULATOR
Inlet Pressure: 3500 psig
Outlet Pressure: 0~25,0~50,0~100 or 0~250 psig
Valve Materials: SS 316L /SS 316L VIM-VAR/SEMI F20 UHP
Valve seat: PCTFE:-10~80°C/ 14 ~176°F PI: -10~150°C/ 14~302°F
Diaphragm: 316L SS、 Elgiloy® Hastelloy®
Operating Temperature: PCTFE Seat: -40° F to 140° F / -40° C to 60° C
Vespel® Seat: -40° F to 350° F / -40° C to 177° C
Leak rates (helium): <1 x 10-9 mbar.L/s
Flow coefficient (Cv): 0.5

Product Details

Product Tags

UP92 series from LITEN is a single stage low pressure reducing regulator for high purity applications. It features a tied-diaphragm design as well as being springless in design and offering VCR connections.

TECHNICAL   DATA

Product

VCR   PRESSURE   REGULATOR

Inlet Pressure:

3500 psig

Outlet Pressure:

0~25,0~50,0~100 or 0~250 psig

Valve Materials

SS 316L/SS 316L VIM-VAR/SEMI F20 UHP

Valve seat

PCTFE:-10~80/14~176°F Pl:-10~150/14~302F

Diaphragm

316L   SSElgiloy®Hastelloy®

Operating Temperature:

PCTFE Seat:-40°F to 140°F/-40°C to 60°C
Vespel®Seat:-40°Fto 350°F/-40°C to 177°C

Leak rates(helium)

<1x10-9 mbar.L/s

Flow coefficient (Cv):

0.5

APPLICATION:

◎ 1/2" point-of-use
◎ Gas cabinets

◎ Semiconductor manufacturing
◎ High flow purging systems

INQUIRY




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