Port Size |
1/4", 1/2",3/8" |
Flow Coefficient (Cv) |
1/2" Cv 0.7; 1/4" Cv 0.3; 3/8" Cv 0.65 |
Diaphragm |
Elgiloy |
Body Material |
SS 316L/SS 316L VIM-VAR/SEMI F20 UHP |
Valve Seat |
PCTFE:-10~80°C/14~176F PL: -10~150°C/ 14~302*F |
Max. Pressure |
300psi |
Leakage Rate (Ammonia) |
Internal: s1x10-9 atm.cc/Sec He External : s1x10-9 atm.cc/Sec He |
Cleaning |
Continuous monitoring with deionized water, using an ultrasonic cleaning system for ultra-high purity cleaning |
Assembly Environment |
In ISO Class 6 or 5 / GB1000 Class or 100 Class dleanroom |
Packaging Material |
Vacuum packaging in PE clean bags |