◎ Maximum control pressure: 3500 psig 
◎ Pressure control range:0~25,0~50,0~100 or 0~250 psig
◎ Material of the main components:
 Seat: PCTFE OR PEEK
 Diaphragm:316L SS、 Elgiloy® Hastelloy®
◎ Operating Temperature:
 PCTFE Seat: -40° F to 140° F / -40° C to 60° C 
 Vespel® Seat: -40° F to 350° F / -40° C to 177° C
◎ Leak rates (helium):<1 x 10-9 mbar.L/s
◎ Flow coefficient (Cv): 0.2
◎ Weight: ≈1.98 |bs(0.9 kg)
◎ Cleaning: Ultrahigh-Purity Process Specification 100 
 Class 100 clean ro